Ion Source and Ion Implater Filaments

Ion Source Filaments are integral components in semiconductor manufacturing equipment and scientific research applications. Typically these components are single helix cylindrical filaments, flat spiral filaments, or planar filaments. Designs vary greatly in such equipment, but Union City Filament is accustomed to recommending appropriate filament configurations and modifying specifications to suit equipment requirements and functionalities. The most common functional materials used to fabricate ion source filaments are tungsten, rhenium and iridium.

Ion Source Filament Products

UCF-SK001_lg

UCF-SK001

Single Helix Filament with legs formed perpendicular to the coil axis. Most commonly used in X-Ray Tubes.

UCF-SK004_lg

UCF-SK004

Single Helix Filament with legs formed perpendicular to the coil axis, 180 degrees apart. Most commonly used in Scientific Research Applications.

UCF-SK005_lg

UCF-SK005

Single Helix Filament with legs formed parallel to the coil axis. Most commonly used in Mass Spectrometers.

UCF-SK010_lg

UCF-SK010

Pigtail Filament with legs formed perpendicular to the coil axis. Most commonly used in Ion Implanters.

UCF-SK011_lg

UCF-SK011

Pigtail Filament with legs formed parallel to the coil axis. Most commonly used in Ion Implanters.

UCF-SK022

UCF-SK022

Single Helix Flat Spiral Filament. Most commonly used in Scientific Research Applications.

UCF-SK028

UCF-SK028

Serpentine Planar Filament. Most commonly used in Ion Implanters and Scientific Instruments.

UCF-SK028

UCF-SK029

Modified Planar "Potato Masher" Filament. Most commonly used in Scientific Instruments and Vacuum Deposition Systems.

Regardless of what your end application is, Union City Filament’s expert engineers will work with you to design the best filament or heater to suit your needs.

Questions? Contact us today for help.