Ion Source and Ion Implanter Filaments

Ion Source Filaments are integral components in semiconductor manufacturing equipment and scientific research applications. Typically these components are single helix cylindrical filaments, flat spiral filaments, or planar filaments. Designs vary greatly in such equipment, but Union City Filament is accustomed to recommending appropriate filament configurations and modifying specifications to suit equipment requirements and functionalities. The most common functional materials used to fabricate ion source filaments are tungsten, rhenium and iridium.


Ion Source Filament Inquiry